Current and Previous Sponsors of the CMMT

Micro Electrical Impedance Spectroscopy of Hair Cells
Principal Investigator: R. Rabbit (B. Frazier)
National Institutes of Health, National Institute on Deafness and Other Communication Disorder
October 2001 - October 2005

Nano-Precision Integrated Electromechanical Filters for UHF Communication
DARPA (MTO NMASP Program), Georgia Tech College of Engineering
Principal Investigator: Dr. Farrokh Ayazi
August 2001 - August 2005

RF MEMS for System-on-Package Applications
NSF (through Georgia Tech's Packaging Research Center)
Principal Investigator: Dr. Farrokh Ayazi
January 2001 - December 2003

High Aspect Ratio MEMS for RF and Sensory Applications
yamacraw (State of Georgia)
Principal Investigator: Dr. Farrokh Ayazi
.May 2000 - May 2003

Pulse-Combustion-Driven Microgenerator
Principal Investigator: M.G. Allen
Army Research Office Multidisciplinary University Research Initiative (MURI)
July, 1998 - June, 2003

Magnetic Microturbine Generators
Principal Investigator: M.G. Allen
Army Research Office MURI (MIT Prime Contractor)
July, 1998 - June, 2003

Microjet and VIDA Coolers for Electronics Applications
Principal Investigator: M.G. Allen
DARPA (Heretic Program)
March, 1999-March, 2002

Adaptive Virtual Aerosurface (AVIA) for UAV/UCAV Applications
Principal Investigator: D. Parekh, GTRI
DARPA
January 1999 - January 2002

Reconfigurable Antenna Apertures
Principal Investigator: L. Pringle, GTRI (M.G. Allen)
DARPA (Recap Program)
May, 1999-May, 2002

Mixed-Signal CMOS Interface IC for Capacitive MEMS Sensors
National Semiconductor Corporation, and Georgia Tech
Principal Investigator: Dr. Farrokh Ayazi
May 2000 - May 2002

Micro Electrical Field Flow Fractionation using RLS Detection,
Principal Investigator: B. Frazier
Genicon Sciences, Inc.
March 2000 - March 2002 Renewable.

Micro Biochemical Analysis Systems and Components
Principal Investigator: B. Frazier
Agilent Technologies
March 2001 - March 2002 Renewable.

Permanent Magnet MEMS Arrays
Principal Investigator: M.G. Allen
DARPA (MEMS Program)
July, 1998 - July, 2001

Wafer Level Batch Packaging
Principal Investigator: J. Meindl (M.G. Allen)
MARCO/DARPA
October 1998 - December 2001

Low Cost Metallic Micro Needle Technologies with Integrated Sensing Functionality
Principal Investigator B. Frazier
Becton Dickinson Technologies
December 1999 - March 2001 Renewable.

Demonstration of Robust Micromachined Jet Technology And Its Application To Realistic Flow Control Problems
Principal Investigator: M.G. Allen
Air Force Office of Scientific Research / DARPA (MEMS Program)
August, 1997 - August, 2000

Acquisition of Equipment for a Laboratory for Micromachined Fluidic Sensors and Actuators
Principal Investigator: M.G. Allen
National Science Foundation (Major Research Instrumentation Program)
June, 1997 - June, 2000

Reduced Order Models for CAD of MEMS
Principal Investigator: M.G. Allen
DARPA (MIT Prime Contractor)
August, 1997 - August, 2000

Intelligent Turbine Engines
Principal Investigator: Ben T. Zinn, AE (M.G. Allen)
DOD Multidisciplinary University Research Initiative Programs
November 1995 - November 2000

Mass Formed Passives for Low Cost Multichip Modules
Principal Investigator: M.G. Allen
DARPA (Motorola prime contractor)
April, 1996 - April, 1999

Micromachined Relays for Automotive Applications
Principal Investigator: M.G. Allen
Robert Bosch Company
October, 1996 - October, 1999

Core Technology Support for SAMPSON Program
Principal Investigator: M.G. Allen
DARPA (McDonnell Douglas Prime Contractor)
June, 1998 - June, 1999

Development of a MEMS-Based Excess Enthalpy Combustion Process and Power Generator
Principal Investigator: M.G. Allen
DARPA (MEMS Program)
August, 1998 - August, 1999

Micromachined Needles for Transdermal Drug Delivery
Principal Investigator: M.G. Allen
National Science Foundation
September 1998 - September, 1999

Low-Cost Electronic Packaging Engineering Research Center
Principal Investigator: Rao R. Tummala (M.G. Allen)
National Science Foundation
October, 1994-October 1999

Neural Network Determination of Optical Phase Correction in a Plane Shear Layer Using Parallel Optoelectronic Image Processing, Global Optical Flow Diagnostics, and Micromachined Actuators and Sensors
Principal Investigator: M.G. Allen
Air Force Office of Scientific Research
May, 1995 - May, 1998

Equipment for Aero-Optics Applications
Principal Investigator: M.G. Allen
Air Force Office of Scientific Research - DURIP Program
March, 1995 - March, 1998

Micromachined Sensors for Real Time Viscosity Monitoring
Principal Investigator: M.G. Allen
Hoechst-Celanese Corporation
October, 1995-May, 1998

Manufacturing Productization of Microjet Cooling Devices
Principal Investigator: M.G. Allen
U.S. Army Missile Command
July, 1997 - September, 1998

Alternatives to the Use of Fluoride in Electronics
Principal Investigator: M.G. Allen
DARPA
January, 1995 - March, 1997

Large Area Manufacturing of Microjet Cooling Devices
Principal Investigator: M.G. Allen
U.S. Army Missile Command
July, 1996 - July, 1997

Additional Microjet Cooling Tasks, Year 2
Principal Investigator: M.G. Allen
U.S. Army Missile Command
July, 1996 - July, 1997

Micromachined Devices for Drug Delivery
Principal Investigator: M.G. Allen
Georgia Tech Institute for Bioscience and Bioengineering Seed Grant
January, 1997 - June, 1997

Infrared Imaging Array Integrated in Three Dimensions Directly on Top of Silicon Circuits
Principal Investigator: M.G. Allen
Naval Weapons Center, China Lake
August, 1991 - April, 1996

Microelectromechanical-Based Diagnostics for Turbulent Shear Flows
Principal Investigator: M.G. Allen
Air Force Office of Scientific Research
June, 1993 - June, 1996

Micromachined Gyroscopic Accelerometers - II
Principal Investigator: M.G. Allen
Millisensor Systems and Actuators
October, 1995 - October, 1996

Microjet Cooling for Missile System Electronics
Principal Investigator: M.G. Allen
U.S. Army Missile Command
July, 1995 - July, 1996

Additional Microjet Cooling Tasks
Principal Investigator: M.G. Allen
U.S. Army Missile Command
January, 1996 - May, 1996

Fabrication of Novel Micromachined Pressure Sensors and Accelerometers
Principal Investigator: M.G. Allen
Georgia Tech Manufacturing Research Center
September, 1995 - September, 1996

Microfluidic Devices and Applications
Principal Investigator: M.G. Allen
GTRC Interdisciplinary Seed Grant
September, 1995 - September, 1996

Evaluation of Polymeric Resistor Materials
Principal Investigator: M.G. Allen
AMP-AKZO Corporation
June, 1995 - June, 1996

Feasibility of Integrated Microrelay Fabrication
Principal Investigator: M.G. Allen
Robert Bosch Company
August, 1995 - January, 1996

Stipend Support for Investigation of Magnetic Polymer Composites
Principal Investigator: M.G. Allen
Georgia Tech Polymer Program
October, 1995 - October, 1996

Micromachined Gyroscopic Accelerometers
Principal Investigator: M.G. Allen
Millisensor Systems and Actuators
December, 1994 - August, 1995

Micromachined Tiles for Electromagnetic Fluid Manipulation
Principal Investigator: M.G. Allen
Naval Undersea Warfare Center
January, 1995 - June, 1995

High Yield, Repairable, Active Matrix Flat Panel Displays
Principal Investigator: M.G. Allen
Georgia Tech Manufacturing Research Center
September, 1994 - September, 1995

Measurement of Solder Mechanical Properties Using Microfabricated Structures
Principal Investigator: M.G. Allen
Army Research Laboratories
June, 1994 - March, 1995

Electroplated Micromachined Accelerometers (*)
Principal Investigator: M.G. Allen
Murata Manufacturing Company
September, 1994 - September, 1995

Micromachined Sensors for Plasma Process Monitoring (*)
Principal Investigator: M.G. Allen
Intel Corporation
September, 1994 - September, 1995

Low-Cost Technologies for Microelectromechanical Systems
Principal Investigator: M.G. Allen
National Science Foundation
August, 1991 - August, 1994

Electroplated Micromachined Structures (*)
Principal Investigator: M.G. Allen
Ford Motor Company
January, 1992 - January, 1994

A Manufacturing Technology for Low Cost Photonic Interconnections
Principal Investigator: M.G. Allen
Georgia Tech Manufacturing Research Center (Army MICOM, Digital)
February, 1992 - February, 1993

Solderless Optical Interconnects Using Epitaxial Lift Off Techniques
Principal Investigator: M.G. Allen
Army Research Laboratory
February, 1993 - February, 1994

An Integrated Microrelay Fabricated Using Thick Film Technology
Principal Investigator: M.G. Allen
International Society for Hybrid Microelectronics
May, 1993 - May, 1994

High Yield Active Matrix Flat Panel Displays
Principal Investigator: M.G. Allen
Georgia Tech Manufacturing Research Center
February, 1993 - February, 1994

Electroplated Micromachined Structures (*)
Principal Investigator: M.G. Allen
Ford Motor Company
January, 1992 - January, 1994

Solderless Optical Interconnects Using Epitaxial Lift Off Techniques
Principal Investigator: M.G. Allen
Army Research Laboratory
February, 1993 - February, 1994

An Integrated Microrelay Fabricated Using Thick Film Technology
Principal Investigator: M.G. Allen
International Society for Hybrid Microelectronics
May, 1993 - May, 1994

High Yield Active Matrix Flat Panel Displays
Principal Investigator: M.G. Allen
Georgia Tech Manufacturing Research Center
February, 1993 - February, 1994

Micromachined High Permeability Magnetic Laminations
Principal Investigator: M.G. Allen
Millisensor Systems and Actuators
July, 1993 - July, 1994