Publications of CMMT Faculty

2002

Z. M. Xiao and J. Bai, "Numerical simulation on a coated piezoelectric sensor interacting with a crack", Finite Elements in Analysis and Design (The International Journal of Applied Finite Elements and Computer Aided Engineering). (In Press)

Park, J.W., Cros, F., and Allen, M.G., "A sacrificial layer approach to highly laminated magnetic cores", MEMS 2002 IEEE international conference,
Las Vegas, USA, p380-383

Joung, Yeun-Ho, Nuttinck, Sebastien, Yoon, Sang-Woong, Allen, M.G., and Laskar, Joy, "Integrated Inductors in the Chip-to-Board Interconnect Layer Fabricated Using Solderless Electroplating Bonding", 2002 IEEE MTT-ss Int. Microwave Symp. Dig.

S. Chandrasekaran and A. B.Frazier, "Mechanical Characterization of Surface Micromachined Hollow Metallic Microneedles", IEEE EMBS Special Topic Conference on Microtechnologies in Medicine & Biology, Madison, WI, May 2002, pp.

S.K. Mohanty, S.K. Ravula, K. Engisch and A.B. Frazier, "Micro Electrical Impedance Spectroscopy of Bovine Chromafin Cells", IEEE EMBS Special Topic Conference on Microtechnologies in Medicine & Biology, Madison, WI, May 2002, pp.

A. Han, O. Wang, S.K. Mohanty, M. Graff and A.B. Frazier, "A Multi-layer Plastic Packaging Technology for Miniaturized Bio Analysis Systems Containing Integrated Electrical and Mechanical Functionality", IEEE EMBS Special Topic Conference on Microtechnologies in Medicine & Biology, Madison, WI, May 2002, pp

T. Edwards, S.K. Mohanty, R.K. Edwards, and C.L. Thomas, "Rapid Micromold Tooling for Injection Molding Microfluidic Components", Accepted for publication in Sensors & Materials, Date Accepted: February 2002.

I. Papautsky, T. Ameel, and A.B. Frazier, "Microscale Single Phase Internal Flow: A Review", Submitted to Journal of Heat Transfer, Date Submitted: January 2002.

N.D. Gallant, J. Capadona, A.B. Frazier, D.M. Collard, and A.J. Garcia, "Micropatterned Surfaces to Engineer Focal Adhesions for Analysis of Cell Adhesion Strengthening", Submitted to Langmuir, Date Submitted: January 2002.

B.K. Gale, K.D. Caldwell, and A.B. Frazier, "Geometrical Scaling Effects in Electrical Field Flow Fractionation. Experimental Analysis", Analytical Chemistry (74) 1024-1030 (2002).

A. Han, O. Wang, S.K. Mohanty, M. Graff, and A.B. Frazier. "Advanced MEMS Packaging for Microfluidic Systems Containing Electrical and Mechanical Functionality", IMAPS Advanced Technology Workshop for Packaging of MEMS and Related Micro Integrated Systems, Scotts Valley, CA, November 2002.

S.Y. No, A. Hashimura, S. Pourkamali, and F. Ayazi, "Single-Crystal Silicon HARPSS Capacitive Resonators with Submicron Gap-Spacing," to appear in Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2002.

D. Balaraman, S. Bhattacharya, F. Ayazi, and J. Papapolymerou, "Low Cost Low Actuation Voltage Copper RF MEMS Switches," to appear in Proc. 2002 IEEE MTT-S International Microwave Symposium (IMS 2002), Seattle, WA, June 2002.

S. Dalmia, F. Ayazi, M. Swaminathan, S.H. Min, S.H. Lee, W. Kim, D.S. Kim, S. Bhattacharya, V. Sundaram, G. White, and R. Tummala, "Design of Inductors in Organic Substrates For 1-3 GHz Wireless Applications," to appear in Proc. 2002 IEEE MTT-S International Microwave Symposium (IMS 2002), Seattle, WA, June 2002.

S. Dalmia, S.H. Lee, S. Bhattacharya, F. Ayazi, M. Swaminathan, "High-Q RF Passives on Organic Substrates Using a Low-Cost Low-Temperature Laminate Process," to appear in Proc. 2002 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2002), Cannes, France, May 2002.

2001

Koser, H., Cros, F., Allen, M.G., and Lang, J.H. "A high torque density MEMS magnetic induction machine", International Conference on solid state sensors and actuators, Transducers 2001, Munich, Germany

Joung, Yeun-Ho, andAllen, M.G., "Micromachined Flexible Interconnect for Wafer Level Packaging", Proceedings of 2001 ASME, November 11-16, 2001, New York, NY

Z. M. Xiao and J. Bai, "Electro-static stress analysis on piezoelectric inhomogeneity-crack interaction", International Journal of Solids and Structure, 38:1369-1394, 2001

I. Papautsky, T.A. Ameel, and A.B. Frazier, "A Review of Laminar Single-Phase Flow in Microchannels", ASME International Mechanical Engineering Congress & Exposition, New York, NY, November 2001, pp. 1-9.

*B.K. Gale, K.D. Caldwell, and A.B. Frazier, "Geometrical Scaling Effects in Electrical Field Flow Fractionation. Theoretical Analysis", Analytical Chemistry, (73) 2345-2352 (2001).

T. Edwards, B.K. Gale, and A.B. Frazier, "Micro Scale Sample Preparation Systems for Biological Analysis", Journal on Micro Biomedical Devices, (3:3) 211-218 (2001).

I. Papautsky, S. Mohanty, R. Weiss, and A.B. Frazier, "High Lane Density Slab Gel Electrophoresis using Micromachined Instrumentation", Electrophoresis, (22:18) 3908-3915 (2001).

T. Edwards, B. Gale, and A.B. Frazier, "Micro Thermal Field Flow Fractionation System", Accepted for publication in Analytical Chemistry, Date Accepted: December 2001.

S.K. Mohanty, M. Graff, K. Ravula, A. Han, and A.B. Frazier, "A Micro Stenciling Process for Wafer Scale Metallization of Plastic Substrates", International Conference on Micro Total Analysis Systems, Monterey, CA, October 2001, pp. 387-88.

M. Graff and A.B. Frazier, "A Micromachined Electrical Field-Flow Fractionation (m-ElFFF) System With Integrated Electrical Conductivity Detection and Complimentary Resonance Light Scattering Detection Systems", International Conference on Micro Total Analysis Systems, Monterey, CA, October 2001, pp. 543-44.

T.L. Edwards and A.B. Frazier, "Micro Thermal Field Flow Fractionation Systems", 12th International Symposium on Field Flow Fractionation, Golden, CO, June 2001, pp. 58-59.

M. Graff and A.B. Frazier, "Micro Electrical Field Flow Fractionation System with Complimentary Conductivity and Resonance Light Scattering Detection", 12th International Symposium on Field Flow Fractionation, Golden, CO, June 2001, pp. 56-57.

I. Papautsky, A.B. Frazier, C.H. Ahn, Thematic Issue on Microfluidics, Journal on Biomedical Microdevices, (3) 173 (2001).
Electrical Detector for Micro-Analysis Systems. Inventors: A. Bruno Frazier, Richard D. Rabbitt, and H. Edward Ayliffe. U.S. Patent No. 6,169,394. Date of Patent: January 2, 2001.

F. Ayazi and K. Najafi, "A HARPSS Polysilicon Vibrating Ring Gyroscope" in IEEE/ASME Journal of Microelectromechanical Systems, June 2001, pp. 169-179.

S.Y. No and F. Ayazi, "The HARPSS Process for Fabrication of Nano-Precision Silicon Electromechanical Resonators", 2001 1st IEEE Conference on Nanotechnology, December 2001, pp. 489-494

2000

Z. M. Xiao and J. Bai, "Shielding and amplifying effect of a piezoelectric inclusion to a crack", Proceedings of the International Conference on Role of Mesomechanics for Development of Science and Technology, June 2000, Xi'an, P. R. China.

Patel,Chirag S., Joung, Yeun-Ho, Martin, Kevin P., and Meindl, James D., "Reliability and Thermo- Mechanical Analysis of Compliant Wafer Level package", 3th Annual Semiconductor Packaging Symposium, SEMICON West, July 11-12, San jose, CA 2000.

C.C. Chung and M.A. Allen. "Junction Isolation of Bulk Silicon MEMS Devices via Thermomigration." Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems. Miyazaki, Japan. pp.153-7. January 23-27, 2000.

Cros, F., Kim, K., and Allen, M.G., "A single mask process for micromachined magnetic devices", Solid state sensor and actuator workshop, Hilton Head Island 2000, p 138-141

Glezer, A., and Allen, M.G., "Synthetic Jet Actuators for Cooling Heated Bodies and Environments," U.S. Patent 6,123,145, issued September, 2000

Glezer, A., and Allen, M.G., "Miniature Reciprocating Combustion-Driven Machinery," U.S. Patent 6,109,222, issued August, 2000

Allen, M.G. and English, J., "System and Method for the Wireless Sensing of Physical Properties," U.S. Patent 6,111,520, issued August, 2000

J. Brazzle, I. Papautsky, and A.B. Frazier, "Hollow Metallic Micromachined Needle Arrays", Journal on Micro Biomedical Devices, (2) 197-205 (2000).

A.B. Frazier, K.D. Caldwell, B.K. Gale, and I.E. Papautsky, "Integrated Micromachined Components for Bio/Chemical Analysis Systems", International Journal of MicroMechatronics, (1) 67-84 (2000).

I. Papautsky, J. Brazzle, H. Swerdlow, and A.B. Frazier, "Micromachined Pipette Arrays", IEEE Transactions on Biomedical Engineering, (47) 812-819 (2000).

A.B. Frazier, "Micro Scale Sample Preparation Systems for Biological Sample Preparation", BioMEMS and Biomedical Nanotechnology World 2000, Columbus, Ohio, September 2000, pp. 10-11.

A.B. Frazier, "Micro Scale Purification Systems for Biological Sample Preparation", Proceedings of the International Symposium on Microfabricated Systems and MEMS V, The Electrochemical Society, Phoenix, AZ, October 2000, Vol. 2000-19, pp. 43-54.

J. Brazzle, D. Bartholomeusz, R. Davies, J. Andrade, R.A. Van Wagenen, and A.B. Frazier, "Active Microneedles with Integrated Functionlality", Solid State Sensor and Actuator Workshop, Hilton Head, SC, June 2000, pp. 199-202.

B.C. Giordano, J.P. Ferrance, A.F.R. Huhmer, S.A. Swedbert, A.B. Frazier, and J.P. Landers, "Noncontact Thermal Cycling for PCR in Microliter and Submicroliter Volumes in Microchips Constructed from Novel Substrates", HPCE'2000, pp. 221.

T.L. Edwards, S.K. Mohanty, R.K. Edwards, C. Thomas, and A.B. Frazier, "Rapid Tooling Using SU-8 for Injection Molding Microfluidic Components", SPIE Micro Fluidic Devices and Systems Conference, Santa Clara, CA, September 2000, pp. 82-89.

D.A. Bartholomeusz, J.D. Andrade, and A.B. Frazier, "Bioluminescent Based ChemChip for Point-of-Care Diagnostics," 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology, Lyon, France, October 2000, pp. 602-606.

B.K. Gale, R.S. Besser, I. Papautsky, J.D. Brazzle, and A.B. Frazier, "Packaging for Biomedical Analysis Systems," IMAPS Advanced Technology Workshop (ATW) for MEMS and Microsystem Packaging and Integration, Orlando, FL, November 2000, pp. 49-52.

Micromachined Electrical Field-Flow Fractionation (?-EFFF) System. Inventors: A. Bruno Frazier, Karin D. Caldwell, and Bruce K. Gale. U.S. Patent No. 6,136,171. Date of Patent: October 24, 2000.

F. Ayazi, "High Aspect-Ratio Poly-Silicon MEMS Technology for Precision Inertial Sensors," Invited Paper, in Proc. 7th Mechatronics Forum International Conference, Atlanta, GA, Sept. 2000.

F. Ayazi, H.H Chen, Fatih Kocer, Guohong He, and K. Najafi "A High Aspect-Ratio Polysilicon Vibrating Ring Gyroscope," in Tech. Dig. Solid-State Sensors and Actuators Workshop, Hilton Head, SC, June 2000, pp. 289-292.

F. Ayazi and K. Najafi, "High Aspect-Ratio Dry-Release Poly-Silicon MEMS Technology for Inertial-Grade Microgyroscopes," in Proc. IEEE 2000 Position Location and Navigation Symposium (PLANS 2000), San Diego, CA, March 2000, pp. 304-308.

F. Ayazi and K. Najafi, "Performance Limits in Inertial-Grade Vibratory Ring Microgyroscopes," in The International Conference on Integrated Nano/Microtechnology for Space Applications (NanoSpace 2000), Houston, TX, January 2000.

F. Ayazi and K. Najafi, "High Aspect-Ratio Combined Poly and Single-Crystal Silicon (HARPSS) MEMS Technology," in IEEE/ASME Journal of Microelectromechanical Systems, Sept. 2000, pp. 288-294.

F. Ayazi and K. Najafi, "High Aspect-Ratio Polysilicon Micromachining Technology," in Sensors and Actuators Journal, A, volume 87, 2000, pp.46-51.

1999
Allen, M.G. and Ahn, C.H., "Fully Integrated Magnetic Micropumps and Methods for Their Fabrication," continuation in part of issued U.S. Patent 5,710,466 (Fully Integrated Magnetic Micromotors and Methods for Their Fabrication); U.S. Patent 5,909,069, issued June, 1999

Lagorce, L., Brand, O., and Allen, M.G., "Magnetic Microactuators Based on Polymer Magnets," IEEE/ASME Journal of Microelectromechanical Systems, vol.8, no.1, p.2-9, March, 1999).

Park, J.Y.; Allen, M.G., "Packaging-Compatible High Q Microinductors and Microfilters for Wireless Applications," IEEE Transactions on Advanced Packaging, vol.22, no.2, p.207-13 (1999)

Kim, Y.J.; Allen, M.G., "In situ measurement of mechanical properties of polyimide films using micromachined resonant string structures," IEEE Transactions on Components and Packaging Technologies, vol.22, no.2, p.282-90 (1999)

Park, J.Y.; Han, S.H.; Allen, M.G., "Batch-fabricated microinductors with electroplated magnetically anisotropic and laminated alloy cores," IEEE Transactions on Magnetics, vol.35, no.5, pt.3, p.4291-4300 (1999)

Taylor, W.P.; Schneider, M.; Baltes, H.; Allen, M.G., "A NiFeMo electroplating bath for micromachined structures," Electrochemical and Solid-State Letters, vol.2, no.12, p.624-6 (1999)

Park, J.Y.; Allen, M.G., "High Q spiral-type microinductors on silicon substrates," IEEE Transactions on Magnetics, vol.35, no.5, pt.2, p.3544-6 (1999)

Allen, M.G., "MEMS for Packages and Packages for MEMS," Invited Technical Address, 1999 ASME Advanced in Electronic Packaging Conference, Maui, Hawaii, May, 1999 (no proceedings).

Z. M. Xiao and J. Bai, "On piezoelectric inhomogeneity related problem ¾ Part I: a close-form solution for the stress field outside a circular piezoelectric inhomogeneity", International Journal of Engineering Science, 37:945-959, 1999.

Z. M. Xiao and J. Bai, "On piezoelectric inhomogeneity related problem ¾ Part II: a circular piezoelectric inhomogeneity interacting with a nearby crack", International Journal of Engineering Science, 37:961-976, 1999.

McAllister, D.V.; Kaushik, S.; Patel, P.N.; Mayberry, J.L.; Allen, M.G.; Prausnitz, M., "Microneedles for transdermal delivery of macromolecules," Proceedings of the First Joint BMES/EMBS Conference:IEEE Engineering in Medici ne and Biology 21st Annual Conference and the 1999 Annual Fall Meeting of the Biomedical E ngineering Society, vol. 2, p. 836 (1999)

English, J.M.; Allen, M.G., "Wireless micromachined ceramic pressure sensors," Technical Digest. IEEE International MEMS 99 Conference: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, p.511-16 (1999)

D.V. McAllister, F. Cros, S.P. Davis, L.M. Matta, M.R. Prausnitz, M.G. Allen, "Three Dimensional Hollow Microneedle and Microtube Arrays,", Proc. Transducers '99 Sendai, Japan, vol. 2, p. 1098-1101 (1999)

D.S. Kercher, P. Seriburi, and M.G. Allen , "An Experimental Study of Microfabricated Nickel Spark Plugs," Proc. Transducers '99 Sendai, Japan, vol. 2, p. 1412-1415 (1999)

I. Papautsky, J. Brazzle, T. Ameel, and A.B. Frazier, "Laminar Fluid Behavior in Microchannels using MicroPolar Fluid Theory", Sensors and Actuators, (73) 101-108 (1999).

H.E. Ayliffe, A. Bruno Frazier, and R.D. Rabbitt, "Electrical Impedance Spectroscopy using Microchannels with Integrated Metal Electrodes", IEEE Journal on Microelectromechanical Systems, (8) 50-57 (1999).

A.B. Frazier, I. Papautsky, T.L. Edwards, and B.K. Gale, "Integrated Sample Preparation Systems for Miniaturized Biochemical Analysis", Tenth International Symposium on Micromechatronics and Human Science, Nagoya, Japan, November 1999, pp. 19-26.

A.B. Frazier, "Packaging of Microfluidic Devices", International Conference on Electronic and Photonic Packaging, Maui, HI, June 1999, pp. 317-323.

A.B. Frazier, J. Brazzle, B.K. Gale, and I. Papautsky, "Miniaturized Devices for Bio/Chemical Sample Preparation", International Device Research Symposium, Charlottesville, VA, December 1999, pp. 471-474.

T.L. Edwards, B.K. Gale, and A.B. Frazier, "A Micromachined Thermal Field Flow Fractionation System (µ-TFFF)", International Conference on Solid-State Sensors and Actuators, Sendia, Japan, June 1999, pp. 742-745.

B.K. Gale, K.D. Caldwell, and A.B. Frazier, "Scaling Effects in Micro Electrical Field Flow Fractionation Systems", 10th International Symposium on Field Flow Fractionation, Paris, France, August 1999, pp. 45-46.

J.D. Brazzle, S. Mohanty, and A.B. Frazier, "Micromachined Multiple Output Port Needle", IEEE International Conference on Engineering in Medicine and Biology, Atlanta, GA, October 1999, pg. 834.

I. Papautsky, S.K. Mohanty, R. Weiss, and A.B. Frazier, "High Lane Density Slab Gel Electrophoresis by Micromachined Instrumentation", IEEE International Conference on Engineering in Medicine and Biology, Atlanta, GA, October 1999, pg. 843.

L. Tian, and A.B. Frazier, "Drug Signaturing Using Impedance Spectroscopy Technique", IEEE International Conference on Engineering in Medicine and Biology, Atlanta, GA, October 1999, pg. 813.

T.L. Edwards, B.K. Gale, and A.B. Frazier, "A Miniaturized Thermal Field Flow Fractionation System", IEEE International Conference on Engineering in Medicine and Biology, Atlanta, GA, October 1999, pg. 848.

B.K. Gale, T.L. Edwards, and A.B. Frazier, "Scaling Effects in Micro Electrical Field Flow Fractionation System with Integrated Detector", IEEE International Conference on Engineering in Medicine and Biology, Atlanta, GA, October 1999, pg. 842.

Methods for Preparing Devices Having Metallic Hollow Microchannels on Planar Substrate Surfaces. Inventors: B. Frazier and Ian Papautsky. U.S. Patent No. 5,871,158. Date of Patent: March 2, 1999.

Surface Micromachined Microneedles. Inventors: A. Bruno Frazier, and John D. Brazzle. U.S. Patent No. 5,876,582. Date of Patent: September 27, 1999.

F. Ayazi and K. Najafi, "High Aspect-Ratio Polysilicon Micromachining Technology," in Proc. 10th Int. Conf. Solid-State Sensors and Actuators (Transducers'99), Sendai, Japan, Jun. 1999, pp. 320-323.

F. Ayazi, H.H. Chen and K. Najafi, "A High Performance Vibratory Silicon Microgyroscope," in Proc. Sixth Annual Strategic and Technical Symposium "Vehicle Displays and Microsensors '99", Ypsilanti, Michigan, Sep. 1999, pp. 153-157.

D. Aslam, V. Papageorgiou, and K. Najafi, "IC-Compatible Technology of Poly-Diamond MEMS," in Proc. Sixth Annual Strategic and Technical Symposium "Vehicle Displays and Microsensors '99", Ypsilanti, Michigan, Sep. 1999, pp. 113-116.

1998
Allen, M.G. and Ahn, C.H., "Fully Integrated Magnetic Micromotors and Methods for Their Fabrication," U.S. Patent 5,710,466, issued January, 1998.

Allen, M.G. and Taylor, W.P., "A Magnetic Relay System and Method Capable of Microfabrication Production," U.S. Patent 5,847,631, issued December, 1998

Allen, M.G. and Glezer, A., "Micromachined Synthetic Jets," continuation in part of issued U.S. Patent 5,758,823 (Synthetic Jet Actuators and Applications Thereof), issued June, 1998.

Allen, M.G., Taylor, W.P., and Park, J.Y., "Microfabricated Electromagnetic System and Method for Forming Electromagnets in Microfabricated Devices," full application filed with U.S. Patent Office June, 1998.

Prausnitz, M., Allen, M.G., McAllister, D., and Henry, S., "Microneedle Device for Transport of Molecules Across Tissue," full application filed with U.S. Patent Office June 10, 1998, and assigned serial number 09/095,221

Allen, M.G. and Taylor, W.P., "A Magnetic Switching System and Method Capable of Microfabrication Production," full application filed with U.S. Patent Office October, 1998.

Taylor, W.P., Brand, O., and Allen, M.G., "Fully Integrated Magnetically Actuated Micromachined Relays," IEEE/ASME Journal of Microelectromechanical Systems, vol. 7, no. 2, pp. 181-191, 1998.

Kim, Y.J., and Allen, M.G., "Surface Micromachined Solenoid Inductors for High Frequency Applications," IEEE Transactions on Components, Packaging & Manufacturing Technology, Part C (Manufacturing), vol. 21, no. 1, pp. 26-33, 1998.

Chahal, P., Tummala, R.R., Allen, M.G., and Swaminathan, M., "A Novel Integrated Decoupling Capacitor for MCM-L Technology," IEEE Transactions on Components, Packaging and Manufacturing Technology, Part B: Advanced Packaging, vol. 21, no. 2, pp. 184-193, 1998.

Henry, S., McAllister, D.V., Allen, M.G., and Prausnitz, M.R., "Microfabricated Microneedles: A Novel Approach to Transdermal Delivery of Drugs," Proceedings of the IEEE Microelectromechanical Systems Conference, Heidelberg, Germany, pp. 494-498, January, 1998.

Park, J.Y. and Allen, M.G., "Development of Magnetic Materials and Processing Techniques Applicable to Integrated Micromagnetic Devices," accepted by Journal of Micromechanics and Microengineering (letter of acceptance received October, 1998; to be published December, 1998).

Park, J.Y. and Allen, M.G., "Packaging-Compatible Microinductors and Microtransformers with Screen-Printed Ferrite using Low Temperature Processes," IEEE Transactions on Magnetics, vol.34, no.4, pt.1, p.1366-8 (1998)

Ahn, C.H. and Allen, M.G. "Micromachined Planar Inductors on Silicon Wafers for MEMS Applications," IEEE Transactions on Industrial Electronics, vol.45, no.6, p.866-76 (1998)

Chang, S.P., Lee, J.B., and Allen, M.G., "A Robust 8x8 Capacitive Pressure Sensor Array," submitted to the American Society of Mechanical Engineers Winter Annual Meeting, Proc. MEMS 98, p. 513-517, 1998 (from the 1998 ASME Winter Annual Meeting, Anaheim, CA).

Park, J.Y. and Allen, M.G., "Development of Magnetic Materials and Processing Techniques Applicable to Integrated Micromagnetic Devices," accepted by Journal of Micromechanics and Microengineering (letter of acceptance received October, 1998; to be published December, 1998).

Taylor, W.P., Brand, O., and Allen, M.G., "Fully Integrated Magnetically Actuated Micromachined Relays," IEEE/ASME Journal of Microelectromechanical Systems, vol. 7, no. 2, pp. 181-191, 1998.

Chang, S.P., Lee, J.B., and Allen, M.G., "A Robust 8x8 Capacitive Pressure Sensor Array," submitted to the American Society of

Mechanical Engineers Winter Annual Meeting, Proc. MEMS 98, p. 513-517, 1998 (from the 1998 ASME Winter Annual Meeting, Anaheim, CA)

Cros, F. and Allen, M.G., "High Aspect Ratio Structures Achieved by Sacrificial Conformal Coating,", Technical Digest, Solid State Sensor and Actuator Workshop, Hilton Head, SC, pp. 261-264, June, 1998.

Agarwal, V., Chahal, P., Tummala, R.R., and Allen, M.G., "Improvements and Recent Advances in Nanocomposite Capacitors using a Colloidal Technique," Proceedings of the 48th Electronic Components and Technology Conference , p.165-70 (1998)

Chahal, P., Tummala, R.R., Allen, M.G., White, G.E., "Electroless Ni-P/Ni-W-P Thin-Film Resistors for MCM-L-based Technologies," Proceedings of the 48th Electronic Components and Technology Conference, p.232-9 (1998)

Allen, M.G., Taylor, W.P., and Kim, K., "Integrated Magnetic Microrelays: Multiple Device Configurations," Proceedings of the National Association of Relay Manufacturers, Orlando, FL, April, 1998 (best paper)

Park, J.Y., and Allen, M.G., "Electroplated and Screen-Printed Magnetic Materials Applicable to Micromachined Magnetic Devices," Proc. Micromachining & Microfabrication '98 Conference, SPIE, vol. 3512, pp. 154-167, Santa Clara, CA, 1998

Park, J.Y., and Allen, M.G., "Micromachined High Q Inductors for High Frequency Applications," Proc. Micromachining & Microfabrication '98 Conference, SPIE, vol. 3514, pp. 218-228, Santa Clara, CA 1998

Park, J.Y. and Allen, M.G., "Packaging-Compatible Microinductors and Microtransformers with Screen-Printed Soft Ferrite Using Low Temperature Processes," 7th IEEE Joint MMM-Intermag Conference, FP-09, San Francisco, California, January, 1998.

Bhattacharya, S., Kim, Y., Chahal, P., Tummala, R., and Allen, M.G., "MCM-L Compatible Integrated Resistors and Capacitors ", 4th International Symposium on Advanced Packaging Materials, March, 1998.

J.D. Brazzle, I.E. Papautsky, and A.B. Frazier, "Micromachined Pipette Arrays (MPA)", *University of Utah's Journal of Undergraduate Research, (8) 9-14 (1998). *Non-refereed Journal.

I. Papautsky, J. Brazzle, H. Swerdlow, and A.B. Frazier, "A Low Temperature, IC Compatible Process for Fabricating Surface Micromachined Metallic Microchannels", IEEE Journal of Microelectromechanical Systems, (7) 267-73 (1998).

B.K. Gale, K.D. Caldwell, and A.B. Frazier, "A Micromachined Electrical Field Flow Fractionation (µ-EFFF) System", IEEE Transactions on Biomedical Engineering, (45) 1459-1470 (1998).

A.B. Frazier, "Technology Transfer: A Case Study from the University Perspective", Commercialization of Microsystems 98, San Diego, CA, September 1998, pp. 517-523.

H.E. Ayliffe, R.D. Rabbitt, and A.B. Frazier, "Microfabricated Electric Impedance Chamber for Electrical Characterization of Single Cells", SPIE V, January 1998, Vol. 3258, pp. 82-90.

I.E. Papautsky, T. Ameel, and A.B. Frazier, "Micro Channel Fluid Behavior using Micro Polar Fluid Theory", 11th IEEE International Workshop on Micro Electro Mechanical Systems, Heidelberg, Germany, January 1998, pp. 544-549. (16.3% acceptance rate for oral presentations)

B.K. Gale, K.D. Caldwell, and A.B. Frazier, "Characterization of a Micromachined Electrical Field Flow Fractionation (µ-EFFF) System", Solid State Sensor and Actuator Workshop, Hilton Head, SC, June 1998, pp. 342-345.

M. Wang, T.A. Ameel, A.B. Frazier, and R.O. Warrington, "Microtube Convection Heat Transfer for a Power-Law Fluid in Laminar Slip Flow with an Isoflux Boundary Condition", 1998 ASME IMECE, Anaheim, CA, October 1998.

B.K. Gale, K.D. Caldwell, and A.B. Frazier, "Electrical Conductivity Particle Detector for Use in Biological and Chemical Micro Analysis Systems", SPIE Micro Fluidic Devices and Systems Conference, Santa Clara, CA, September 1998, pp. 230-241.

I. Papautsky, J. Brazzle, T.A. Ameel, and A.B. Frazier, "Parallel Sample Manipulation using Micromachined Pipette Arrays", SPIE Micro Fluidic Devices and Systems Conference, Santa Clara, CA, September 1998, pp. 104-115.

J. Brazzle, I. Papautsky, and A.B. Frazier, "Fluid Coupled Metallic Micromachined Needle Arrays", SPIE Micro Fluidic Devices and Systems Conference, Santa Clara, CA, September 1998, pp. 116-124.

I. Papautsky, T. Ameel, and A.B. Frazier, "Single-Phase Fluid Flow in Microchannels", Second International Symposium on Advanced Energy Systems and Related Technologies, Nagoya, Japan, December 1998, pp. 186-187.

A.B. Frazier, Special Section on Micromachining, IEEE Transactions on Industrial Electronics, (45) 853 (1998).

A.B. Frazier, K.D. Caldwell, T. Ameel, B.K. Gale, and I. Papautsky, "Micro Scale Fluid Analysis Systems: Applications and Engineering Issues", 7th International Symposium on Field Flow Fractionation, Salt Lake City, UT, February 1998, pg. 74.

J.D. Brazzle, I. Papautsky, and A.B. Frazier, "Fluid Coupled Micromachined Needle Arrays (MPA)", IEEE International Conference on Engineering in Medicine and Biology, Hong Kong, October 1998, pg. 1837.

N. Yazdi, F. Ayazi, and K. Najafi, "Micromachined Inertial Sensors," Invited paper, Proceedings of the IEEE, Aug. 1998, pp.1640-1659.

Park, J.Y., Han, S.H., Taylor, W.P., and Allen, M.g., "Fully Integrated Micromachined Inductors with Electroplated Anisotropic Magnetic Cores", Proceedings of the IEEE Applied Power Electronics Conference. Anaheim, CA, pp. 379-385, vol. 1, February, 1998.

1997
Joung, Yeun-Ho and Song, Jun-Tae, "Fabrication of SAW filter using PZT ceramics", Journal of KIEEME Vol.10, No.1, pp1-pp7 (1997.1)

Allen, M.G. and Ahn, C.H., "Fully Integrated Micromachined Magnetic Particle Manipulator and Separator," U.S. Patent 5,655,665, issued August, 1997.

Brand, O., English, J.M., Bidstrup, S.A., and Allen, M.G., "Micromachined Viscosity Sensor for Real-Time Polymerization Monitoring," Proceedings of the 9th International Conference on Solid State Sensors and Actuators (Transducers '97), Chicago, IL, pp. 121-124, vol. 1, June, 1997

Taylor, W.P. and Allen, M.G., "Integrated Magnetic Microrelays: Normally Open, Normally Closed, and Multi-Pole Devices," Proceedings of the 9th International Conference on Solid State Sensors and Actuators (Transducers '97), Chicago, IL, pp. 1149-1152, vol.2, June, 1997

Taylor, W.P., Schneider, M., Baltes, H., and Allen, M.G., "Electroplated Soft Magnetic Materials for Microsensors and Microactuators," Proceedings of the 9th International Conference on Solid State Sensors and Actuators (Transducers '97), Chicago, IL, pp. 1445-8, vol. 2, June, 1997

Allen, M.G., "Micromachined Intermediate and High Frequency Inductors," Proceedings of 1997 IEEE International Symposium on Circuits and Systems ISCAS, Hong Kong, pp. 2829-32, vol.4, 1997.

Park, J.Y., and Allen, M.G., "Low Temperature Fabrication and Characterization of Integrated Packaging-Compatible, Ferrite-Core Magnetic Devices," Proceedings of the IEEE Applied Power Electronics Conference, Atlanta, GA, pp. 361-367, vol. 1, February, 1997.

Park, J.Y., Bhattacharya, S., and Allen, M.G., "Fully Integrated Passives Modules for Filter Applications using Low Temperature Processes," IMAPS Proceedings of the 1997 International Symposium on Microelectronics (SPIE vol. 3235), Philadelphia, PA, pp. 592-597, October, 1997.

Taylor, W.P., Dauwalter, C.R., and Allen, M.G., "Fully Integrated Magnetically Actuated Microrelays," Proceedings of the National Association of Relay Manufacturers, Orlando, FL, April, 1997 (best paper)

Kim, Y.J. and Allen, M.G., "Surface Micromachined Solenoid Inductors for High Frequency Applications," IMAPS Proceedings of the 1997 International Symposium on Microelectronics (SPIE vol. 3235), Philadelphia, PA, pp. 1-6, October, 1997.

Lagorce, L., Brand, O., Kercher, D., Glezer, A., and Allen, M.G., "Micromachined Jets for Electronic Cooling Applications," IMAPS Proceedings of the 1997 International Symposium on Microelectronics (SPIE vol. 3235), Philadelphia, PA, pp. 592-597, October, 1997

Chahal, P., Li, W., Park, J., Tummala, R., Allen, M.G., and Bhattacharya, S., "Integrated Thin-Film L-C Array on PWB," IMAPS Advanced Technology Workshop on Passive Component Technology, Atlanta, GA, March, 1997.

Park, J.Y., Lagorce, L., and Allen, M.G., "Ferrite-Based Integrated Planar Inductors and Transformers Fabricated at Low Temperature," IEEE International Magnetics Conference (INTERMAG 97), ED-06, New Orleans, Louisiana, April, 1997.

Lee, J.B., English, J., Ahn, C.-H., and Allen, M.G., "Planarization Techniques for Vertically Integrated Metallic MEMS on Silicon Foundry Circuits," Journal of Micromechanics and Microengineering, vol. 7, no. 2, pp. 44-54, 1997.

Lagorce, L.K. and Allen, M.G., "Magnetic and Mechanical Properties of Micromachined Strontium Ferrite/Polyimide Composites," IEEE/ASME Journal of Microelectromechanical Systems, vol. 6, no. 4, pp. 307-312, 1997.

Frazier, A.B. and Allen, M.G., "Uses of Electroplated Aluminum for the Development of Microstructures and Micromachining Processes," IEEE/ASME Journal of Microelectromechanical Systems, vol. 6, no. 2, pp. 91-98, 1997.

Park, J.Y., Lagorce, L.K., and Allen, M.G., "Ferrite-Based Integrated Planar Inductors and Transformers Fabricated at Low Temperature," IEEE Transactions on Magnetics, vol. 33, no. 5, pt. 1, pp. 3322-3324, 1997.

A.B. Frazier and M.G. Allen, "Uses of Electroplated Aluminum for the Development of Microstructures and Micromachining Processes", Journal of Microelectromechanical Systems, (1) 91-99 (1997).

A.B. Frazier, B.K. Gale, and I. Papautsky, "Metallic Micromachined Pipettes and Bioanalysis Systems", International Symposium on Mechatronics and Human Science, Nagoya, Japan, October 1997, pp. 5-12.

A. B. Frazier and J. Jara-Almonte, "Chapter 116: Precision Metallic Microstructures and Micro Molding Technologies", in the Industrial Electronics Handbook (ed: J. D. Irwin), CRC Press & IEEE Press, 1997, pp. 1489-1514.

P. McWhorter, A.B. Frazier, and P. Rai-Choudhury, "Chapter 1: Micromachining and Trends for the Twenty-First Century ", in the SPIE Handbook of Microlithography, Micromachining, and Microfabrication (ed: P. Rai-Choudhury), ISBN 0-85296-9111-2, 1997, pp. 4-30.

B.K. Gale, K. Caldwell, and A.B. Frazier, "Micromachined Electrical Field Flow Fractionation System", 10th IEEE International Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, January 1997, pp. 207-212. (24.5% acceptance rate for oral presentations)

I. Papautsky, H. Swerdlow, and A.B. Frazier, "Surface Micromachined IC Compatible Technology for Fabricating Metallic MicroChannels", 10th IEEE International Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, Jan. 1997, pp. 104-109. (37.7% acceptance rate)

B. Ganesh, T.A. Ameel, D.G. Petelenz, D.A. Chinn, R.A. Normann, and A.B. Frazier, "Packaging of Neural Stimulation/Recording Systems: Review and New Mechanism for Interfacing Passive Electrodes and Signal Processing Circuitry", International Conference on Electronic and Photonic Packaging, Kona, HI, June 1997, pp. 112-117.

H.E. Ayliffe, A.B. Frazier, and R.D. Rabbitt, "The Development of a Microfabricated Device to Measure the Electric Impedance of Individual Leukocytes", Am. Soc. Mech. Eng. Biomedical Engineering Conference, June 1997, vol. 35, pp. 485-486.

J.L. Hunt-Holmes, H. Swerdlow, and A.B. Frazier, "Integrated Microchannels with Metallic and Polymeric Channel Sections", International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 1997, pp. 519-522. (42.4% acceptance rate for presentations)

H.E. Ayliffe, R.D. Rabbitt, P.A. Tresco, and A.B. Frazier, "Micromachined Cellular Characterization System for Studying the Biomechanics of Individual Cells", International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 1997, pp. 1307-1310. (28.1% acceptance rate for oral presentations)

I.E. Papautsky, J.D. Brazzle, H. Swerdlow, and A.B. Frazier, "Micromachined Pipette Arrays (MPA)", IEEE International Conference on Engineering in Medicine and Biology, Chicago, IL, October 1997, pp. 2281-2284.

I.E. Papautsky, J.D. Brazzle, H. Swerdlow, and A.B. Frazier, "Macro-to-Micro Sample Interfacing Instrumentation", BioMedical Engineering Conference, San Diego, CA, October 1997, pg. 1.

1996

A. Selvakumar, F. Ayazi, and K. Najafi, "A High Sensitivity Z-Axis Torsional Silicon Accelerometer," in Tech. Dig. IEEE Int. Electron Devices Meeting (IEDM), San Francisco, CA, Dec. 1996, p.765-768.

Joung, Yeun-Ho, Yeo, Dong-Hun, and Song, Jun-Tae, "Fabrication of SAW filter on PZT and LiNbO3 substrates", Proceeding of the Autumn Symposium of KIEEME, pp40-43 (1996.11)

Hodge, T.C., Kohl, P.A., Bidstrup, S.A., Lee, J.B. and Allen, M.G., "In-Situ Thermal Expansion Measurements of Interlevel Dielectric Polymer Films", in Polyimides: Trends in Materials and Applications, pp. 287 - 302 (C. Feger, Mahmoud M. Khojasteh, Steven E. Molis Eds.), Connecticut: Society of Plastic Engineers, 1996.

Carter-Coman, C., Brown, A.S., Bicknell-Tassius, R., Jokerst, N.M., and Allen, M.G., "Strain-Modulated Epitaxy: A Flexible Approach to 3-D Band Structure Engineering Without Surface Patterning," Applied Physics Letters, vol. 69, no. 2 pp. 257-259, 1996.

C.C. Chung and M.A. Allen. "Measurement of Mechanical Properties of Electroplated Nickel-Iron Alloys." Micro-Electro-Mechanical Systems (MEMS). 1996 International Mechanical Engineering Congress and Exposition. Atlanta, Georgia, USA. p. 453-7. November 17-22, 1996.

Ahn, C.H. and Allen, M.G., "A Comparison of Two Micromachined Inductors (Bar- and Meander-Type) for Fully Integrated Boost DC/DC Power Converters," IEEE Transactions on Power Electronics, vol. 11, no. 2, pp. 239-245, 1996.

Lee, J.B., Allen, M.G., Hodge, T.C., Bidstrup, S.A., and Kohl, P.A., "Modeling of Substrate-Induced Anisotropy in Through-Plane Thermal Behavior of Polymeric Thin Films," Journal of Polymer Science, Part B (Polymer Physics), vol. 34, no. 9, pp. 1591-6, 1996.

Nami, Z., Ahn, C.H., and Allen, M.G., "An Energy-Based Design Criterion for Magnetic Microactuators," Journal of Micromechanics and Microengineering, vol. 6, no. 3, pp. 337-44, 1996.

Ahn, C.H., Allen, M.G., Trimmer, W., Jun, Y.-N., and Erramilli, S., "A Fully Integrated Micromachined Magnetic Particle Separator," IEEE/ASME Journal of Microelectromechanical Systems, vol. 5, no. 3, pp. 151-158, 1996.

Chung, C. and Allen, M.G., "Measurement of Mechanical Properties of Electroplated Nickel-Iron Alloys," American Society of Mechanical Engineers Dynamic Systems and Control Division, vol. 55, pp. 453-457, ASME, New York, NY, 1996 (from the 1996 ASME Winter Annual Meeting, Atlanta, GA).

Konaka, Y. and Allen, M.G., "Single and Multilayer Electroplated Microaccelerometers," Proceedings of the IEEE Microelectromechanical Systems Workshop, San Diego, CA, pp. 168-173, February, 1996.

Lagorce, L.K., and Allen, M.G., "Micromachined Polymer Magnets," Proceedings of the IEEE Microelectromechanical Systems Workshop, San Diego, CA, pp. 85-90, February, 1996.

Taylor, W.P., Allen, M.G., and Dauwalter, C.R., "A Fully Integrated Magnetically Actuated Micromachined Relay," Technical Digest, Solid State Sensor and Actuator Workshop, Hilton Head, SC, pp. 231-234, June, 1996.

Park, J.Y. and Allen, M.G., "A Comparison of Micromachined Inductors with Different Magnetic Core Materials," Proceedings of the 46th Electronic Components and Technology Conference, Orlando, FL, pp. 120-125, May, 1996.

Chahal, P., Tummala, R., Allen, M.G., and Swaminathan, M., "A Novel Integrated Decoupling Capacitor for MCM-L Technology," Proceedings of the 46th Electronic Components and Technology Conference, Orlando, FL, pp. 125-132, May, 1996.

Baker, M., Brand, O., Allen, M., and May, G., "A Micromachined Etch Rate Sensor for In-Situ Monitoring of Plasma Etching," Proceedings of the 54th Device Research Conference, Santa Barbara, CA, pp. 120-121, June, 1996

Baker, M., Brand, O., Allen, M., and May, G., "A Micromachined Sensor for In-Situ Monitoring of Wafer State in Plasma Etching," Proceedings of the SPIE, vol. 2876, Austin, TX, pp. 98-106, October, 1996.

Lagorce, L.K. and Allen, M.G., "Ferrite Filled Polymers for Integrated Power Conversion Devices," IMAPS Proceedings of the 1996 International Symposium on Microelectronics (SPIE vol. 2920), Minneapolis, MN, pp. 176-180, October, 1996

Park, J.Y. and Allen, M.G., "A Comparison of Micromachined Inductors with Different Magnetic Core Materials," Proceedings of the 46th Electronic Components and Technology Conference, Orlando, FL, pp. 375-381, 1996.

Park, J.Y. and Allen, M.G., "High Current Integrated Microinductors and Microtransformers using Low Temperature Fabrication Processes," IMAPS Proceedings of the 1996 International Symposium on Microelectronics (SPIE vol. 2920), Minneapolis, MN, pp. 120-125, October, 1996

Taylor, W.P., Allen, M.G., and Dauwalter, C.R., "A Fully Integrated Magnetically Actuated Micromachined Relay," IMAPS Proceedings of the 1996 International Symposium on Microelectronics (SPIE vol. 2920), Minneapolis, MN, p. 202-207, October, 1996 (best paper)

Chahal, P., Tummala, R.R., and Allen, M.G., "Integrated Capacitors using Polymer-Ceramic Components for MCM-L", IMAPS Proceedings of the 1996 International Symposium on Microelectronics (SPIE vol. 2920), Minneapolis, MN, pp. 126-131, October, 1996.

Park, J.Y., and Allen, M.G., "Microfabricated Inductors and Transformers for Integrated Passives," Proceedings of ISHM Advanced Technology Workshop on Passive Component Technology, Atlanta, GA, March, 1996.

Chahal, P., Chung, C., Tummala, R., and Allen, M.G., "Filled Polymer Dielectrics for Integrated Capacitors," 1996 International Society for Hybrid Microelectronics Integrated Passives Workshop, Braselton, GA, March, 1996.

Park, J.Y. and Allen, M.G., "Packaging-Compatible Integrated Inductors and Transformers," 1996 International Society for Hybrid Microelectronics Integrated Passives Workshop, Braselton, GA, March, 1996.

1995
Lee, J.B., Chen, Z., Allen, M.G., Rohatgi, A., and Arya, R., "A Miniaturized High-Voltage Solar Cell Array as an Electrostatic MEMS Power Supply," IEEE/ASME Journal of Microelectromechanical Systems, vol. 4, no. 3, pp. 102-108, 1995.

Allen, M.G., "Integrated Inductors for Low Cost Electronic Packages', Technical Digest, 1995 International Electron Devices Meeting," Washington, DC, pp. 137-141, December 1995. (invited address to Novel Technologies and Opportunities Symposium of IEDM).

Schneider, M., Castagnetti, R., Allen, M.G., and Baltes, H., "Integrated Flux Concentrator Improves CMOS Magnetotransistors," Proceedings of the IEEE Microelectromechanical Systems Workshop, Amsterdam, Netherlands, pp. 151-156, 1995.

Ahn, C.H. and Allen, M.G., "Fluid Micropumps Based on Rotary Magnetic Microactuators," Proceedings of the IEEE Microelectromechanical Systems Workshop, Amsterdam, Netherlands, pp. 408-412, 1995.

Coe, D.J., Allen, M.G., Smith, B.L., and Glezer, A., "Addressable Micromachined Jet Arrays," Proceedings of the 8th International Conference on Solid State Sensors and Actuators (Transducers '95), Stockholm, Sweden, vol. 2, pp. 329-332, June, 1995.

Ahn, C.H. and Allen, M.G., "Micromachined Planar Inductors with Electroplated Nickel-Iron Permalloy Cores (spiral type, solenoid type, and toroidal-meander type)", Proceedings of the Fourth International Symposium on Magnetic Materials, Processes, and Devices (Electrochemical Society Fall Meeting), Chicago, Illinois, pp. 411-425, October, 1995.

Jokerst, N.M., Brooke, M.A., and Allen, M.G., "Processes for Lift-Off of Thin Film Materials or Devices for Fabricating Three Dimensional Integrated Circuits, Optical Detectors, and Micromechanical Devices," U.S. Patent 5,401,983, issued March, 1995.

R.L. Cadenhead and A.B. Frazier, "Solid State Microelectronic Sensors: A Core Digest", Journal of Microcircuits and Electronic Packaging, (18) 51-75 (1995).

A.B. Frazier, C. Friedrich, and R.O. Warrington, "The Miniaturization Technologies: Past, Present, and Future", IEEE Transactions on Industrial Electronics, (42) 423-430 (1995).

A.B. Frazier, "Recent Applications of Polyimide to Micromachining Technology", IEEE Transactions on Industrial Electronics, (42) 442-448 (1995).

A.B. Frazier, "Wafer-to-wafer Bonding with Thick High Aspect Ratio Embedded Micro Channels", Journal of Microsystem Technologies, (5) 287-92 (1995).

P. Coane, J. T. Cook, D. J. Monk, A. B. Frazier, and R. O. Warrington, "Packaging Issues in the Miniaturization Technologies", ASME International Intersociety Electronic Packaging Conference and Exhibition (INTERPack95), Kona, HI: March 1995.

D. Beebe, A.B. Frazier, and R. Gao, "Application of MEMS Technologies to Biomedical Instrumentation," 188th Meeting of The Electrochemical Society, Chicago, IL, October 1995, pp. 100-116.

A.B. Frazier, "Wafer-to-wafer Bonding with Thick High Aspect Ratio Embedded Micro Channels", High Aspect Ratio Micro Structures Conference (HARMST), Karlsruhe, Germany, June 1995.

A.B. Frazier, "Low Temperature IC-Compatible Wafer-to-Wafer Bonding with Embedded Micro Channels for Integrated Sensing Systems", 38th Midwest Symposium on Circuits and Systems, Rio De Janeiro, Brazil, August 1995, pp. 505-508.

A.B. Frazier, "Micromachined Precision Cutting Tools", 17th International Conference of the IEEE Engineering in Medicine and Biology Society, Montreal, Canada, September 1995, pp. 7.1.1.1.

1994
Ahn, C.H. and Allen, M.G., "New Toroidal-Meander-Type Integrated Inductor with a Multilevel Meander Magnetic Core," IEEE Transactions on Magnetics, vol. 30, no. 1, pp. 73-79, 1994.

Ahn, C.H., Kim, Y.J., and Allen, M.G., "A Fully Integrated Planar Toroidal Inductor with a Micromachined Nickel-Iron Magnetic Bar," IEEE Transactions on Components, Packaging, and Manufacturing Technology, Part A, vol. 17, no. 3, pp. 463-469, 1994.

Frazier, A.B., Olson, C.S, Turner, S.P., and Allen, M.G., "Characterization of Graphite-Filled Polyimide Thin Films Using Micromachining Techniques," International Journal of Microcircuits and Electronic Packaging, vol. 17, no. 1, pp. 37-49, 1994.

Wilkinson, S.T., Kim, Y.W., Jokerst, N.M., and Allen, M.G., "Integration of Thin Film Optoelectronic Devices onto Micromachined Movable Platforms," IEEE Photonics Technology Letters, vol. 6, no. 9, pp. 1115-1118, 1994.

Frazier, A.B., Ahn, C.H., and Allen, M.G., "Development of Micromachined Devices using Polyimide-Based Processes," Sensors and Actuators A (Physical), vol. A45, no. 1, pp. 47-55, 1994.

Hodge, T.C., Lin, L., Lee, J.B., Bidstrup, S.A., Kohl, P.A., and Allen, M.G., "Anisotropy in Thermal, Electrical and Mechanical Properties of Spin-Coated Polymer Dielectrics," in Materials Research Society Symposium Proceedings no. 338, Materials Reliability in Microelectronics, pp. 577-587, Pittsburgh, PA, 1994 (from the 1994 MRS Spring Meeting, San Francisco, CA).

Ahn, C.H., and Allen, M.G., "A Comparison of Two Micromachined Inductors (bar-type and meander-type) for Fully Integrated Boost DC/DC Power Converters," Proceedings of the Ninth Annual IEEE Applied Power Electronics Conference, Orlando, FL, vol. 1, pp. 10-16, February, 1994. (invited plenary address)

Allen, M.G., "Design, Fabrication, and Application of Magnetic Microactuators," Proceedings of the 5th International Symposium on Micro Machine and Human Science, Nagoya, Japan, p. 5, October, 1994. (invited plenary address)

Ahn, C.H. and Allen, M.G., "A Fully Integrated Micromachined Magnetic Particle Manipulator and Separator," Proceedings of the IEEE Microelectromechanical Systems Workshop, Oiso, Japan, pp. 91-96, 1994.

Lee, J.B., Chen, Z., Allen, M.G., Rohatgi, A., and Arya, R., "A High Voltage Solar Cell Array as an Electrostatic MEMS Power Supply," Proceedings of the IEEE Microelectromechanical Systems Workshop, Oiso, Japan, pp. 331-336, 1994.

Coe, D., Trautman, M.A., Allen, M.G., and Glezer, A., "Micromachined Jets for Manipulation of Macro Flows," Technical Digest, Solid State Sensor and Actuator Workshop, Hilton Head, SC, pp. 243-247, 1994.

Wang, Y., Fike, S., Allen, M.G., and Jokerst, N.M., "Measurement of Adhesion of GaAs Thin Films Using the Blister Test," Proceedings of the Annual Meeting of the Adhesion Society, Orlando, FL, February, 1994.

Hodge, T.C., Bidstrup, S.A., Kohl, P.A., Lee, J.B., and Allen, M.G., "An In-Situ Measurement Technique for Through-Plane Thermal Properties of Thin Dielectric Films," Proceedings of the 1994 International Conference and Exhibition on Multichip Modules (SPIE vol. 2256), Denver, CO, pp. 344-349, 1994.

Hodge, T.C., Kohl, P. A., Bidstrup, S. A., Lee, J. B., and Allen, M. G., "In-Situ Thermal Expansion Measurements of Interlevel Dielectric Polymer Films," Fifth International Conference on Polyimide Films, Ellenville, NY, November, 1994.

Hodge, T. C., Bidstrup, S. A., Kohl, P. A., Lee, J. B., and Allen, M. G., "Mechanical Anisotropy in Interlevel Polymer Dielectric Films," American Institute of Chemical Engineers Fall Meeting, San Francisco, CA, November, 1994

Jokerst, N.M., Brooke, M.A., and Allen, M.G., "Three Dimensional Integrated Circuits with Lift-Off," U.S. Patent 5,280,184, issued January, 1994.

Drabik, T.J., Jokerst, N.M., Brooke, M.A., and Allen, M.G., "Processes for Lift-Off and Deposition of Thin Film Materials," U.S. Patent 5,286,335, issued February, 1994.

A.B. Frazier, S.C. Olson, S.P. Turner, and M.G. Allen, "Characterization of Graphite-Filled Polyimide Thin Films Using Micromachining Techniques", Journal of Microcircuits and Electronic Packaging, (1) 37-49 (1994).

A.B. Frazier, C.H. Ahn, and M.G. Allen, "Development of Micromachined Devices Using Polyimide-Based Processes", Sensors and Actuators, (45) 47-55 (1994).

A.B. Frazier, "Development of Micromachining Technologies using Electroplated Metals", Extended Abstract from the 186th Meeting of the Electrochemical Society, Miami Beach, FL: ECS. October 1994, pp. 499-500.

A.B. Frazier, R.P. Powers, and M.G. Allen, "Thin Film Programmable Interconnect Arrays", International Conference & Exhibition on Multichip Modules, Denver, CO: ISHM, IEPS. April 1994, pp. 293-298.

A.B. Frazier, "Uses of Polyimide for Micromachining Applications", 20th Annual Conference of the IEEE Industrial Electronics Society, Bologna, Italy: SICE, AEI. September 1994, pp. 1483-1487. * Best Paper of Session, Second Best Paper of Symposium

R.O. Warrington and A.B. Frazier, "The Miniaturization Technologies: Past, Present, and Future", 20th Annual Conference of the IEEE Industrial Electronics Society, Bologna, Italy: SICE, AEI. September 1994, pp. 1460-1465.

A.B. Frazier and M.G. Allen, "Uses of Electroplated Aluminum in Micromachining Applications", IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC: Transducers Research Foundation. June 1994, pp. 91-96. (30.1% acceptance rate for presentations)

1993
Frazier, A.B. and Allen, M.G., "Piezoresistive Graphite/Polyimide Thin Films for Micromachining Applications," Journal of Applied Physics (73), pp. 4428-4433, 1993.

Ahn, C.H. and Allen, M.G., "A Planar Micromachined Spiral Inductor for Integrated Magnetic Microactuator Applications," Journal of Micromechanics and Microengineering, vol. 3, no. 2, pp. 37-44, 1993.

Ahn, C.H. and Allen, M.G., "A Fully Integrated Surface Micromachined Magnetic Microactuator with a Multilevel Meander Magnetic Core," IEEE/ASME Journal of Microelectromechanical Systems, vol. 2, no. 1, pp. 15-22, 1993.

Frazier, A.B. and Allen, M.G., "Metallic Microstructures Fabricated Using Photosensitive Polyimide Electroplating Molds," IEEE/ASME Journal of Microelectromechanical Systems, vol. 2, no. 2, pp. 87-94, 1993.

Ahn, C.H., Kim, Y.J., and Allen, M.G., "A Planar Variable Reluctance Magnetic Micromotor with Fully Integrated Stator and Coils," IEEE/ASME Journal of Microelectromechanical Systems, vol. 2, no. 4, pp. 165-73, 1993.

Nami, Z., Ahn, C.H., and Allen, M.G., "Magnetic Analysis of an Overlapped Cantilever Beam Using Finite Elements," American Society of Mechanical Engineers Dynamic Systems and Control Division, vol. 46, pp. 1-6, ASME, New York, NY, 1993 (from the 1993 ASME Winter Annual Meeting, New Orleans, LA).

Allen, M.G., "Fabrication of Thick Electroplated Microstructures Using Polyimide Electroplating Molds," Proceedings of the Seventh International Conference On Solid State Sensors and Actuators (Transducers '93), Yokohama, Japan, pp. 60-65, June, 1993.

Ahn, C.H., Kim, Y.J., and Allen, M.G., "A Planar Variable Reluctance Micromotor with Fully Integrated Stator and Wrapped Coils," Proceedings of the IEEE Microelectromechanical Systems Workshop, Fort Lauderdale, FL, pp. 1-6, February, 1993.

Rashidian, B. and Allen, M.G., "Electrothermal Microactuators Based On Dielectric Loss Heating," Proceedings of the IEEE Microelectromechanical Systems Workshop, Fort Lauderdale, FL, pp. 24-29, February, 1993.

Frazier, A.B., O'Brien, D., and Allen, M.G., "Two Dimensional Metallic Microelectrode Arrays for Recording and Stimulation of Neurons," Proceedings of the IEEE Microelectromechanical Systems Workshop, Fort Lauderdale, FL, pp. 195-200, February, 1993.

Ahn, C.H. and Allen, M.G., "A Fully Integrated Micromachined Toroidal Inductor With A Nickel-Iron Magnetic Core," Proceedings of the Seventh International Conference On Solid State Sensors and Actuators (Transducers '93), Yokohama, Japan, pp. 70-73, June, 1993.

Wilkinson, S., Kim, Y. W., Allen, M. G., and Jokerst, N. M., "Integration of Thin Film Compound Semiconductcor Photonic Devices Onto Micromachined Movable Platforms," Proceedings of the Seventh International Conference On Solid State Sensors and Actuators (Transducers '93), Yokohama, Japan, pp. 148-151, June, 1993.

Wilkinson, S., Kim, Y., Jokerst, N., and Allen, M.G., "Integration of Thin Film Devices Onto Micromachined Movable Platforms," Proceedings of the IEEE Lasers and Electro Optics Society Annual Meeting, pp. 98-99, San Jose, CA, November, 1993.

Jokerst, N. M., Allen, M. G., and Brooke, M. A., "Micro-Opto-Mechanical Systems," Prospector V: Microelectromechanical Systems and Their Applicability to the Soldier System, Park City, Utah, March 22-24, 1993.

Ahn, C.H., Frazier, A.B., and Allen, M.G., "Magnetic Microactuators," Prospector V: Microelectromechanical Systems and Their Applicability to the Soldier System, Park City, Utah, March 22-24, 1993.

Jokerst, N. M., Brooke, M. A., and Allen, M. G., "Hybrid Smart Infrared Focal Plane Array Integrated in Three Dimensions," Army Smart Infrared Focal Plane Array Workshop, Washington, D. C., July 26-28, 1993

Kim, Y.J. and Allen, M.G., "Measurement of Polymer Mechanical Properties Using Microfabricated Resonant Structures," American Institute of Chemical Engineers Fall Meeting, St. Louis, Missouri, November, 1993.

Hodge, T., Lee, J.B., Bidstrup, S.A., Kohl, P.A., and Allen, M.G., "An In-Situ Measurement Technique for Through-Plane Properties of Thin Polymer Films," American Institute of Chemical Engineers Fall Meeting, St. Louis, Missouri, November, 1993.

Jokerst, N.M., Brooke, M.A., and Allen, M.G, "Processes For Lift-Off of Thin Film Materials and For the Fabrication of Three Dimensional Circuits," U.S. Patent 5,244,818, issued September, 1993.

A.B. Frazier and M.G. Allen, "Piezoresistive Graphite/Polyimide Thin Films for Micromachining Applications", Journal of Applied Physics, (73) 4428-4433 (1993).

A.B. Frazier and M.G. Allen, "Metallic Microstructures Fabricated Using Photosensitive Polyimide Electroplating Molds", Journal of Microelectromechanical Systems, (2) 87-94 (1993).

A.B. Frazier, D.P. O'Brien, and M.G. Allen, "Two Dimensional Metallic Microelectrode Arrays for the Extracellular Stimulation and Recording of Neurons", 6th IEEE International Workshop on Micro Electro Mechanical Systems, Ft. Lauderdale, FL: IEEE Robotics and Automation Society. February 1993, pp. 195-200. (36.9% acceptance rate for presentations)

A.B. Frazier, "Telecommunications and Utilities Applications of Micromachining", Southeastern Regional IEEE Meeting, Birmingham, AL, September 1993.

1992
Jardine, A.P., Johnson, G.C., Crowson, A., and Allen, M.G. (eds.), Smart Materials Fabrication and Materials for Microelectromechanical Systems, Materials Research Society Press, vol. 276, 1992.

Kim, Y.W. and Allen, M.G., "Single and Multilayer Surface Micromachined Platforms Using Electroplated Sacrificial Layers," Sensors and Actuators , A35, pp. 61-68, 1992.

Camperi-Ginestet, C., Kim, Y.W., Jokerst, N., Allen, M.G., and Brooke, M., "Three Dimensional Integrated Circuits: Compound Semiconductor Detectors Integrated Directly On Top Of Integrated Circuits," IEEE Photonics Technology Letters, vol. 4, no. 9, pp. 1003-6, 1992.

Frazier, A.B., Kahn, M.R., and Allen, M.G., "Mechanical and Piezoresistive Properties of Graphite-Filled Polyimide," in Materials Research Society Symposium Series no. 317, Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems, pp. 295-301, Materials Research Society Press, Pittsburgh, PA, 1992 (from the 1992 MRS Spring Meeting, San Francisco, California, April, 1992).

Camperi-Ginestet, C., Jokerst, N.M., Augustine, G., Hargis, M., and Allen, M.G., "Alignable Deposition of Thin Film Semiconductor Materials for Integrated Micro-Opto-Electronic Systems," in Materials Research Society Symposium Proceedings no. 317, Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems, pp. 131-136, Materials Research Society Press, Pittsburgh, PA, 1992 (from the 1992 MRS Spring Meeting, San Francisco, CA, April, 1992).

Ahn, C.H. and Allen, M.G., "A Fully Integrated Micromagnetic Actuator with a Multilevel Meander Inductive Core," Technical Digest, IEEE Solid State Sensor and Actuator Workshop, Hilton Head, SC, pp. 14-18, June, 1992.

Frazier, A.B. and Allen, M.G., "Mechanical and Piezoresistive Properties of Graphite-Filled Polyimide for Hybrid Micromachined Systems," ISHM '92 Proceedings; Proceedings of the 1992 International Symposium on Microelectronics (SPIE vol. 1847), Los Angeles, CA, pp. 41-46, October, 1992. (best paper of symposium)

Kim, Y.W., Allen, M.G., and Hartman, N.F., "Micromechanically Based Integrated Optic Modulators and Switches," Proceedings of the SPIE, Boston, MA, vol. 1793, pp. 183-189, September, 1992.

Camperi-Ginestet, C., Kim, Y. W., Wilkinson, S., Allen, M., and Jokerst, N. M., "Micro-Opto-Mechanical Devices and Systems Using Epitaxial Lift Off," NASA/JPL Workshop on Microtechnologies and Their Applications to Space Systems, Pasadena, CA, April, 1992.

Camperi-Ginestet, C., Kim, Y.W., Jokerst, N.M., Allen, M.G., and Brooke, M.A., "Three Dimensional Integrated Circuits: Epitaxial Lift Off GaAs Photodetectors Integrated Directly on Top of Silicon Circuits," IEEE Summer Topical Meeting on Smart Pixels, Santa Barbara, California, August, 1992.

Rashidian, B. and Allen, M.G., "RF-Heated Electrothermal Microactuators," presented to the Acoustical Society of America, New Orleans, Louisiana, November, 1992.

A.B. Frazier and M.G. Allen, "High Aspect Ratio Electroplated Microstructures Using A Photosensitive Polyimide Process", 5th IEEE International Workshop on Micro Electro Mechanical Systems, Travemunde, Germany: IEEE Robotics and Automation Society. February 1992, pp. 87-92. (38.3% acceptance rate for presentations)

A.B. Frazier, M.R. Khan, and M.G. Allen, "Mechanical and Piezoresistive Properties of Graphite-Filled Polyimide Thin Films", Materials Research Society 1992 Spring Meeting, San Francisco, CA: Materials Research Society. April 1992, pp. 295-302.

A.B. Frazier and M.G. Allen, "Mechanical and Piezoresistive Properties of Graphite-Filled Polyimide for Hybrid Micromachined Systems", International Symposium on Microelectronics, San Francisco, CA: International Society for Hybrid Microelectronics. October 1992, pp. 99-105. * Best Paper of Session, Best Paper of Symposium

1991
Camperi-Ginestet, C., Hargis, M., Jokerst, N., and Allen, M.G., "Alignable Epitaxial Liftoff of Gallium Arsenide Materials with Selective Deposition Using Polyimide Diaphragms," IEEE Photonics Technology Letters, vol. 3, no. 12, pp. 1123-1125, 1991.

Frazier, A.B., Babb, J.W., Allen, M.G., and Taylor, D.G., "Design and Fabrication of Electroplated Micromotor Structures," American Society of Mechanical Engineers Dynamic Systems and Control Division, vol. 32, pp. 135-148, ASME, New York, NY, 1991 (from the 1991 ASME Winter Annual Meeting, Atlanta, GA).

Rashidian, B. and Allen, M.G., "Integrated Piezoelectric Polymers for Microsensing and Microactuation Applications," American Society of Mechanical Engineers Dynamic Systems and Control Division, vol. 32, pp. 171-179, ASME, New York, NY, 1991 (from the 1991 ASME Winter Annual Meeting, Atlanta, GA).

Kim, Y.W. and Allen, M.G., "Surface Micromachined Platforms Using Electroplated Sacrificial Layers," Proceedings of the Sixth International Conference On Solid State Sensors and Actuators (Transducers '91), San Francisco, CA, pp. 651-654, June, 1991.

Ahn, C.H. and Allen, M.G., "Measurement of Polymer Mechanical Properties Using Microfabricated Resonant Structures," Proceedings of the American Chemical Society Division of Polymeric Materials: Science and Engineering, Atlanta, Georgia, vol. 64, 1991.

Camperi-Ginestet, C., Hargis, M., Jokerst, N. M., Allen, M., and Drabik, T., "Alignable Epitaxial Lift Off GaAs Materials Using Polyimide Diaphragms," Proceedings of the Integrated Photonics Research Topical Meeting, vol. 8, pp. 27-28, IEEE and Optical Society of America, Monterey, California, April, 1991.

A.B. Frazier and M.G. Allen, "Polyimide Electroforming Molds and Applications to Micromachining", 1991 Georgia Institute of Techology / Industry Polymers Meeting, Atlanta, GA, February 1991.

A.B. Frazier, J.W. Babb, and M.G. Allen, "Design and Fabrication of Electroplated Micromotor Structures", The Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, GA: American Society of Mechanical Engineers. December 1991, pp. 135-146.

1990
Allen, M.G., Special Tests For Membranes and Miniature Components, in the American Society for Materials International Handbook Volume 3: Adhesives and Sealants, ASM Press, Metals Park, Ohio, 1990.

Allen, M.G., Nikolich, A., Scheidl, M., and Smith, R.L., "Movable Micromachined Silicon Plates with Integrated Position Sensing," Sensors and Actuators, A21-A23, pp. 211-214, 1990.

Allen, M.G., Nagarkar, P., and Senturia, S.D., "An XPS Analysis of Polyimide/Substrate Fracture Surfaces," Proceedings of the Society of Plastics Engineers Annual Technical Conference, vol. 36, Dallas, Texas, May 1990.

Allen, M.G. and Senturia, S.D., "Method and Apparatus for the Quantitative Measurement of Adhesion of Thin Films," U.S. Patent 4,899,581, issued February, 1990.

1989
Allen, M.G., Nagarkar, P.V., and Senturia, S.D., "Aspects of Adhesion Measurement of Thin Polyimide Films," in Polyimides: Materials, Chemistry, and Characterization, pp. 705-717, (C. Feger, ed.) Elsevier Science Publishers, Amsterdam, 1989.

Allen, M.G. and Senturia, S.D., "Application of the Island Blister Test for Thin Film Adhesion Measurement," Journal of Adhesion, vol. 29, pp. 219-231, 1989.

Allen, M.G., Scheidl, M., and Smith, R.L., "Design and Fabrication of Movable Silicon Plates Suspended by Flexible Supports," Proceedings of the IEEE Microelectromechanical Systems Workshop, Salt Lake City, UT, pp. 76-81, February, 1989.

Allen, M.G., Nikolich, A., Scheidl, M., and Smith, R.L., "Movable Micromachined Silicon Plates With Integrated Position Sensing," Proceedings of the Fifth International Conference On Solid State Sensors and Actuators (Transducers '89), Montreux, Switzerland, June, 1989.

Nagarkar, P.V., Searson, P.C., Belluci, F., Allen, M.G., and Latanision, R.M., "Interfacial Interactions Affecting Polyimide Reliability," Proceedings of the 39th Electronic Components Conference, Houston, Texas, pp. 160-166, May, 1989.

1988
Allen, M.G. and Senturia, S.D., "Microfabricated Structures for the Measurement of Adhesion and Mechanical Properties of Polymer Films," in Adhesives, Sealants, and Coatings for Space and Other Harsh Environments, pp. 501-508, (L.H. Lee, ed.), Plenum Press, New York, 1988.

Allen, M.G. and Senturia, S.D., "Analysis of Critical Debonding Pressures of Stressed Thin Films in the Blister Test," Journal of Adhesion, vol. 25, pp. 303-315, 1988.

Maseeh, F., Schmidt, M.A., Allen, M.G., and Senturia, S.D., "Calibrated Measurements of Elastic Limit, Modulus, and Residual Stress of Thin Films Using Micromachined Suspended Membranes," Technical Digest, IEEE Solid State Sensors Workshop, Hilton Head, SC, pp. 84-87, June, 1988.

Allen, M.G. and Senturia, S.D., "Polyimide-Metal Adhesion Measurement Using Microfabricated Structures," Proceedings of the Society of Plastics Engineers Annual Technical Conference, Atlanta, Georgia, vol. 34, pp. 997-999, April, 1988.

Allen, M.G. and Senturia, S.D., "Measurement of Polyimide Interlayer Adhesion Using Microfabricated Structures," presented at the Symposium on Polymeric Materials for Electronic Packaging of the American Chemical Society, Proceedings of the American Chemical Society Division of Polymeric Materials: Science and Engineering, Los Angeles, California, vol. 59, pp. 352-356, September, 1988.

Allen, M.G. and Senturia, S.D., "Peeling of Thin Films Using Island Blisters," presented as a poster paper at the Gordon Conference on the Science of Adhesion, New Hampton, New Hampshire, August 1987, and as a full paper to the Fifth International Meeting of the Adhesion Society, Williamsburg, Virginia, February, 1988.

Allen, M.G., Nagarkar, P.V., and Senturia, S.D., "Aspects of Adhesion Measurement of Thin Polyimide Films," Third Annual Conference on Polyimides, Ellenville, New York, November, 1988.

Allen, M.G. and Senturia, S.D., "Measurement of Enhancement and Degradation of Polyimide Film Adhesion," American Institute of Chemical Engineers Annual Meeting, Washington, D.C., November, 1988.

1987
Allen, M.G., Mehregany, M., Howe, R.T., and Senturia, S.D., "Microfabricated Structures for the In-Situ Measurement of Residual Stress, Young's Modulus, and Ultimate Strain of Thin Films," Applied Physics Letters, vol. 51, no. 4, pp. 241-244, 1987.

Allen, M.G. and Senturia, S.D., "Microfabricated Structures for the Measurement of Adhesion and Mechanical Properties of Polymer Films," Proceedings of the American Chemical Society Division of Polymeric Materials: Science and Engineering, Denver, Colorado, vol. 56, pp. 735-739, April 1987.

A.B. Frazier and Y.T. Tzeng, "Patterned High Voltage Anodization of Thin Film Aluminum", 1987 Spring Meeting of the Electrochemical Society, Boston, MA, March 1987.

1986
Mehregany, M., Allen, M.G., and Senturia, S.D., "The Use of Microfabricated Structures for the Measurement of Mechanical Properties and Adhesion of Polymer Films," Technical Digest, IEEE Solid State Sensors Workshop, Hilton Head, SC, pp. 58-61, June, 1986.

1985
Hasan, T., Allen, M.G., and Cooperman, B.S., "Anhydrotetracycline is a Major Product of Tetracycline Photolysis," Journal of Organic Chemistry, vol. 50, no. 10, pp. 311-313, 1985.